Infinitesima announces the shipment of RPM-3D to imec for the joint development of 3D tomographic metrology.
Read the recent article in Semiconductor Engineering about Next Generation AFM
https://semiengineering.com/manufacturing-bits-march-2/
Infinitesima will be presenting a joint paper with IMEC on EUV mask metrology on Wednesday, June 9.
Check out the 2021 EUVL Workshop Agenda & Abstract Book
