Infinitesima announces the shipment of RPM-3D to imec for the joint development of 3D tomographic metrology.
The RPM 3D is a modified version of the Rapid Probe Microscope (RPM). The RPM 3D has been modified to enable automated tomography applications including new characterisation modes such as conductivity which will be specifically applied to the imec collaboration. The program will initially focus on the optimisation and automation of a method that sequentially images the structure surface using one probe and then uses a much harder diamond probe to accurately remove layers. This enables the build up of a 3D probe microscope image vertically through the structure of interest. This technique is currently performed manually, but the time this takes limits its application.