History

Dec

Joint development program signed with IMEC.

Sep

WW Tech appointed as exclusive Sales and Service representative for Korea

Aug

Scientech appointed as exclusive Sales and Service representative for Taiwan

Mar

View the video VLSI Research interviews CEO Peter Jenkins on Metrology and Inspection

Feb

Joint presentaion with IMEC at SPIE Advanced Lithography conference

The application of a Rapid Probe Microscope RPM) for investigating 1D and 2D structures for EUV lithography. Andrew D. L. Humphris; Alain Moussa; Mirea Dusa; Anne-Laure Charley; Elis Newham; Jenny Goulden; Lei Feng; Christopher Bevis

www.spiedigitallibrary.org/conference-proceedings-of-spie/11325/113251M/The-application-of-a-Rapid-Probe-Microscope-RPM-for-investigating/10.1117/12.2552054.short

A novel high throughput probe microscope: for measuring 3D structures, designed for in-line, integrated or standalone operation. A. D. L. Humphris, L. Fen, M. Tedaldi, L. Mudarikwa, D. Ockwell, J. Goulden

www.spiedigitallibrary.org/conference-proceedings-of-spie/11325/113252H/A-novel-high-throughput-probe-microscope--for-measuring-3D/10.1117/12.2551693.short

Jan

Production version of RPM Generation 6 shipped to Japanese partner for qualification.

Customer accptance of first hybrid wafer RPM-SEM system.

Infinitesima announces Peter Jenkins as President and Chief Executive Officer. Glyn Davies continues as Non-Executive Director.

RPM Generation 6 shipped with Japanese partner integrated in state-of-the-art defect review SEM to leading logic manufacturing in the USA for hybrid wafer metrology.

RPM Generation 6 introduced for wafer applications including support for advanced probes for high aspect ratio device structures.

First RPM shipment on Zeiss MeRiT® neXT Mask Repair system

Infinitesima rellocates to new facility in Abingdon.

Joint presentation with SEMATECH at SPIE Advanced Lithography Conference

Probe Microscopy for Metrology of Next Generation Devices. Andrew D. L, Humphris, Bin Zhao, David Bastard, Benjamin Bunday

www.spiedigitallibrary.org/conference-proceedings-of-spie/9778/97782L/Probe-microscopy-for-metrology-of-next-generation-devices/10.1117/12.2219035.short

Hybrid Adaptive Mode introduced for high aspect ratio structures.

Infinitesima Ltd announces major RPM design win with Zeiss.

RPM generation 5: Vacuum RPM system introduced

RPM generation 4: Vacuum mode demonstrated

RPM generation 4: Addition of photo-thermal actiuation for high speed actuation

RPM generation 3: First operational module

RPM generation 2: 1^st imaging demonstrator

RPM generation 1: Intereferometer demonstrator completed

Move into first office in Oxford. Team grows to 5 people.

Infinitesima formed as a spin out of University of Bristol Scanning Probe Microscopy by CTO Andrew Humphris.