Infinitesima presented a joint paper with IMEC on SPM tomographic sensing at IPFA 2021 on September 14th
The article is titled: Improving tomographic sensing of Scalpel SPM with multi-probe functionality and automatic removal rate extraction
Authors: C. O’Sullivan,a*, M. Tedaldi,a*, C. Drilakis,b*, T. Hantschel,b*, A.D.L. Humphris,a*,c*, J.P.Hole,a*, J. Goulden,a*, U. Celanob,d*
- Infinitesima Ltd., Hitching Court, Abingdon OX14 1RG UK
- IMEC, 3001 Leuven, Belgium
- School of Physics, University of Bristol, BS8 1TL
- Faculty of Science and Technology University of Twente, Enschede, The Netherlands
For more information, please visit the website of IEEE’s International Symposium on the Physical and Failure Analysis of Integrated Circuits
